Thermocouple, resistive heater, and method of calibrating temperature of resistive element

A method of calibrating temperature of a resistive element includes: generating a standard resistance-temperature (R-T) curve for the resistive element in an isothermal condition, wherein the resistive element comprises a material with a Curie temperature; generating an operational R-T curve for the...

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Bibliographische Detailangaben
Hauptverfasser: OHSE, JEREMY, ZHANG, SANHONG, JYSTAD, STEVEN, CULBERTSON, DAVID P, BRUMMELL, ROGER, KOSS, PETE, JOHANNES, AUSTIN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A method of calibrating temperature of a resistive element includes: generating a standard resistance-temperature (R-T) curve for the resistive element in an isothermal condition, wherein the resistive element comprises a material with a Curie temperature; generating an operational R-T curve for the resistive element during a normal operation of the resistive element; shifting the operational R-T curve toward the standard R-T curve at the Curie temperature to generate an adjusted operational R-T curve; and adjusting a measured temperature of the resistive element based on a resistance of the resistive element and the adjusted operational R-T curve.