Electronic article and forming method of film for electronic article

With a view to simultaneously achieving reduction in sputter adhesion to an electronic article and improvement in durability required for maintenance of a film, the electronic article (10) has a film (3) which is formed on the surface of an underlayer member (1) and which is composed of a calcined a...

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Bibliographische Detailangaben
Hauptverfasser:	FUKUHARA, TOMOHIRO, NAKAMURA, MASAKI, IMAIZUMI, TOYOHIRO, TATSUNO, YOSUKE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE ADHESIVES APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL CHEMISTRY DYES METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL PAINTS PERFORMING OPERATIONS POLISHES PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SPRAYING OR ATOMISING IN GENERAL TRANSPORTING USE OF MATERIALS AS ADHESIVES
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Beschreibung
Zusammenfassung:	With a view to simultaneously achieving reduction in sputter adhesion to an electronic article and improvement in durability required for maintenance of a film, the electronic article (10) has a film (3) which is formed on the surface of an underlayer member (1) and which is composed of a calcined and cured product of a film solution of a binder resin comprising a fluorine-based resin and a ceramic filler, wherein the fluorine-based resin is distributed increasingly more in the film (3) toward the surface on the side opposite to the underlayer member (1).