TWI798187B

A structure including a metal oxide semiconductor layer and a noble metal oxide layer, wherein the metal oxide semiconductor layer and the noble metal oxide layer are adjacent to each other, and a film thickness of the noble metal oxide layer is more than 10 nm.

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Bibliographische Detailangaben
Hauptverfasser: NAGASAKI, YOSHIKAZU, SEKIYA, TAKASHI, TSURUMA, YUKI, KAWASHIMA, EMI, UEOKA, YOSHIHIRO
Format: Patent
Sprache:chi
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Beschreibung
Zusammenfassung:A structure including a metal oxide semiconductor layer and a noble metal oxide layer, wherein the metal oxide semiconductor layer and the noble metal oxide layer are adjacent to each other, and a film thickness of the noble metal oxide layer is more than 10 nm.