Compositions for removing a photoresist from a substrate and uses thereof

The disclosed and claimed subject matter relates to photoresist stripper solutions that include (i) one or more inorganic bases; (ii) two or more organic solvents; (iii) one or more corrosion inhibitors and can optionally include (iv) one or more secondary solvent(s).

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Bibliographische Detailangaben
Hauptverfasser: CAO, YUANMEI, WANG, LILI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The disclosed and claimed subject matter relates to photoresist stripper solutions that include (i) one or more inorganic bases; (ii) two or more organic solvents; (iii) one or more corrosion inhibitors and can optionally include (iv) one or more secondary solvent(s).