TWI796103B

This inspection device comprises a camera and coaxial illumination. The coaxial illumination comprises a half mirror, a light source unit, a plate-shaped member, and an adjustment unit. The half mirror is disposed so as to be inclined in relation to an observation axis joining an object under inspec...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MIZUTA, AYAKA, KANAYAMA, YUTO, CHEN, YENYU, OZEKI, TAKATOSHI
Format: Patent
Sprache:chi
Schlagworte:
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