TWI796103B

This inspection device comprises a camera and coaxial illumination. The coaxial illumination comprises a half mirror, a light source unit, a plate-shaped member, and an adjustment unit. The half mirror is disposed so as to be inclined in relation to an observation axis joining an object under inspec...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MIZUTA, AYAKA, KANAYAMA, YUTO, CHEN, YENYU, OZEKI, TAKATOSHI
Format: Patent
Sprache:chi
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Beschreibung
Zusammenfassung:This inspection device comprises a camera and coaxial illumination. The coaxial illumination comprises a half mirror, a light source unit, a plate-shaped member, and an adjustment unit. The half mirror is disposed so as to be inclined in relation to an observation axis joining an object under inspection and the camera upon the observation axis. The light source unit emits light toward the half mirror from a different direction than the observation axis. The light emitted by the light source unit is reflected by the half mirror and emitted onto the object under inspection. The plate-shaped member is disposed between the light source unit and half mirror. A plurality of roughly parallel slits are formed in the plate-shaped member. The adjustment unit is for adjusting the placement of the plate-shaped member.