TWI795563B

The present invention provides an inspection jig and an inspection method, which are possible to exactly measure a pixel size of a photographing means. A plate-shaped inspection jig (100), which measures a pixel size of a photographing means of a processing device, comprises: a first pattern (102) h...

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Bibliographische Detailangaben
1. Verfasser:	HANAJIMA, SATOSHI
Format:	Patent
Sprache:	chi
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	The present invention provides an inspection jig and an inspection method, which are possible to exactly measure a pixel size of a photographing means. A plate-shaped inspection jig (100), which measures a pixel size of a photographing means of a processing device, comprises: a first pattern (102) having different width on a surface of a plate body (101); a second pattern (103) and a third pattern (104); and a two-dimensional code (105) recording measurement values of each width (La, Lb, Lc) of the first pattern (102), the second pattern (103) and the third pattern (104).