Semiconductor structures

A semiconductor structure includes: a substrate; a channel layer on the substrate; a barrier layer on the channel layer; a source structure and a drain structure on opposite sides of the barrier layer; a doped compound semiconductor layer on the barrier layer, and the doped compound semiconductor la...

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Bibliographische Detailangaben
Hauptverfasser:	LIN, SHINNG, LIN, PO-HENG, LIN, CHIH-HUNG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A semiconductor structure includes: a substrate; a channel layer on the substrate; a barrier layer on the channel layer; a source structure and a drain structure on opposite sides of the barrier layer; a doped compound semiconductor layer on the barrier layer, and the doped compound semiconductor layer has a first side adjacent to the source structure, a second side adjacent to the drain structure, and at least one opening exposing at least a portion of the barrier layer; a dielectric layer on the doped compound semiconductor layer and the barrier layer; and a gate structure on the doped compound semiconductor layer.