Semiconductor device with self-aligning contact and method for fabricating the same

The present application discloses a method for fabricating a semiconductor device. The method includes forming a fin on a substrate; forming a gate structure on the fin; forming impurity regions on two sides of the fin; forming contacts correspondingly on the impurity regions; and forming conductive covering layers correspondingly on the contacts. Forming the contacts includes forming lower portions correspondingly on the impurity regions and below the first dielectric layer; forming middle portions correspondingly on the lower portions; and forming upper portions correspondingly on the middle portions, and protruding from the top surface of the second dielectric layer.