TWI793722B

Semiconductor memory device includes: a first and second member each extending in a first direction in a boundary part between a first and second block region and arranged in the first direction; a support pillar arranged between the first and second member at the boundary part; conductive layers se...

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Bibliographische Detailangaben
Hauptverfasser: MASAKI, MITSUNORI, HIROTSU, YU, SHIGA, KANAKO, NOJIMA, KAZUHIRO, MIYAZAKI, SHOICHI, YOTSUMOTO, AKIRA, MATSUURA, OSAMU, KATO, HISASHI
Format: Patent
Sprache:chi
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Zusammenfassung:Semiconductor memory device includes: a first and second member each extending in a first direction in a boundary part between a first and second block region and arranged in the first direction; a support pillar arranged between the first and second member at the boundary part; conductive layers separated from one another and arranged in a third direction and split by the first and second member, and the support pillar into a first and second portion; and a memory pillar penetrating through the conductive layers. The support pillar includes a lower and upper pillar. A side face of the lower pillar and an extension of a side face of the upper pillar are displaced from each other in a plane based on a second and the third direction.