TWI792029B

A piezo-electric element includes a piezo-electric element part, a support part, and a stretchable film. The piezo-electric element part includes a piezo-electric film and electrodes between which the piezo-electric film is sandwiched in a thickness direction. The support part supports a peripheral...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YAMADA, HIDEO, KUCHIJI, HIROYUKI, TESHIGAHARA, AKIHIKO, MIZUTANI, ATSUSHI, MASUMOTO, NAOKI
Format: Patent
Sprache:chi
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Beschreibung
Zusammenfassung:A piezo-electric element includes a piezo-electric element part, a support part, and a stretchable film. The piezo-electric element part includes a piezo-electric film and electrodes between which the piezo-electric film is sandwiched in a thickness direction. The support part supports a peripheral portion of the piezo-electric element part. The stretchable film is provided in an oscillation region located inside of the peripheral portion of the piezo-electric element part. The stretchable film also has a higher elasticity than that of the piezo-electric element part.