METAL SURFACE COATING MACHINE AND MANUFACTURING METHOD THEREOF

A metal surface coating machine for coating a metal surface of a metal article includes a first process chamber and a second process chamber. The first process chamber has a linear plasma module and a conveyer module. The first process chamber defines therein a first transition area, a plasma proces...

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Bibliographische Detailangaben
Hauptverfasser:	WEI, MU-YUAN, LI, YUANI, LIU, CHUNGUNG, LIN, CHUNG-HSUAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS METALLURGY PRINTED CIRCUITS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A metal surface coating machine for coating a metal surface of a metal article includes a first process chamber and a second process chamber. The first process chamber has a linear plasma module and a conveyer module. The first process chamber defines therein a first transition area, a plasma processing area, and a second transition area successively. The linear plasma module is installed in the plasma processing area. The conveyer module makes the metal article to move to and fro between the first transition area and the second transition area in a movement direction for the linear plasma module to provide surface treatment to the metal article. The second process chamber is communicated with the first process chamber and receives the metal article coming from the first process chamber. The second process chamber is where sputter coating is done on the surface of the metal article.