Metrology method

A method provides the steps of receiving an image from a metrology tool, determining individual units of said image and discriminating the units which provide accurate metrology values. The images are obtained by measuring the metrology target at multiple wavelengths. The discrimination between the...

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Bibliographische Detailangaben
Hauptverfasser:	DAVIS, TIMOTHY DUGAN, ENGBLOM, PETER DAVID, BHATTACHARYYA, KAUSTUVE, NOOT, MARC JOHANNES, ZWIER, OLGER VICTOR, GRZELA, GRZEGORZ, MATHIJSSEN, SIMON GIJSBERT JOSEPHUS, DEN BOEF, ARIE JEFFREY, GEMMINK, JAN-WILLEM, HUIJGEN, RALPH TIMOTHEUS
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A method provides the steps of receiving an image from a metrology tool, determining individual units of said image and discriminating the units which provide accurate metrology values. The images are obtained by measuring the metrology target at multiple wavelengths. The discrimination between the units, when these units are pixels in said image, is based on calculating a degree of similarity between said units.