TWI786136B
A substrate holder for holding a substrate comprises: a first holding member having a first opening part for exposing a first surface of the substrate; and a second holding member for holding the substrate by sandwiching the same with the first holding member, the second holding member having a seco...
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| Format: | Patent |
| Sprache: | chi |
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| Zusammenfassung: | A substrate holder for holding a substrate comprises: a first holding member having a first opening part for exposing a first surface of the substrate; and a second holding member for holding the substrate by sandwiching the same with the first holding member, the second holding member having a second opening part for exposing a second surface of the substrate. The first holding member has at least one first external connection contact point, and the second holding member has at least one second external connection contact point that is separate from the first external connection contact point. |
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