Triode type ionization vacuum gauge and pressure measurement method

A triode type ionization vacuum gauge capable of accurately measuring the internal pressure of a measurement object is disclosed. The triode type ionization vacuum gauge of the present invention includes a filament, a grid, and an ion collector. The grid is disposed around the filament. The cylinder...

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Bibliographische Detailangaben
Hauptverfasser: MIYASHITA, TAKESHI, SATO, TAKANOBU, NAKAJIMA, TOYOAKI, FUKUHARA, MASAHIRO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A triode type ionization vacuum gauge capable of accurately measuring the internal pressure of a measurement object is disclosed. The triode type ionization vacuum gauge of the present invention includes a filament, a grid, and an ion collector. The grid is disposed around the filament. The cylinder-shaped ion collector is disposed around the grid, and is made of a material having a thermal conductivity above 173 W/m DEG K under 300K.