Triode type ionization vacuum gauge and pressure measurement method

A triode type ionization vacuum gauge capable of accurately measuring the internal pressure of a measurement object is disclosed. The triode type ionization vacuum gauge of the present invention includes a filament, a grid, and an ion collector. The grid is disposed around the filament. The cylinder...

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Bibliographische Detailangaben
Hauptverfasser:	MIYASHITA, TAKESHI, SATO, TAKANOBU, NAKAJIMA, TOYOAKI, FUKUHARA, MASAHIRO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A triode type ionization vacuum gauge capable of accurately measuring the internal pressure of a measurement object is disclosed. The triode type ionization vacuum gauge of the present invention includes a filament, a grid, and an ion collector. The grid is disposed around the filament. The cylinder-shaped ion collector is disposed around the grid, and is made of a material having a thermal conductivity above 173 W/m DEG K under 300K.