TWI785708B

The subject of the present invention is to prevent the damage of the target and utilize a simple structure to remove the foreign matter. The present invention comprises a stage 10, a sound head 20, and a movable mechanism 30. The sound head 20 includes a plurality of ultrasonic loudspeakers 21 and a casing 22, so multiple ultrasonic waves generated by the plurality of ultrasonic loudspeakers 21 are concentrated in the gap 14 between the casing 22 and the holding surface 10a of the stage 10 to form a low-pressure zone 40. Thus, the foreign matter 90 attached on the surface 15 of electronic component 13 may be attracted to the low-pressure zone 40 for removing the foreign matter 90 from the surface 15.