Novel pad-in-a-bottle (pib) technology for advanced chemical-mechanical planarization (cmp) slurries and processes

A novel pad-in-a-bottle (RIB) technology for advanced chemical-mechanical planarization (CMP) slurries, systems and processes has been disclosed. The role of conventional polishing pad asperities is played by high-quality micron-size polyurethane (PU) beads that are comparable to the sizes of pores...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: PHILIPOSSIAN, ARA, LANGAN, JOHN G, SHI, XIAOBO, O'NEILL, MARK LEONARD, SAMPURNO, YASA
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A novel pad-in-a-bottle (RIB) technology for advanced chemical-mechanical planarization (CMP) slurries, systems and processes has been disclosed. The role of conventional polishing pad asperities is played by high-quality micron-size polyurethane (PU) beads that are comparable to the sizes of pores and asperities in polishing pads.