Protective film-forming film and complex sheet for forming protective film
The present invention provides an energy ray-curable film for forming a protective film. The film for forming the protective film is capable of forming the protective film on the rear surface of a semiconductor wafer or a semiconductor chip, and is provided with a protective layer having a high elas...
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The present invention provides an energy ray-curable film for forming a protective film. The film for forming the protective film is capable of forming the protective film on the rear surface of a semiconductor wafer or a semiconductor chip, and is provided with a protective layer having a high elastic modulus. This film 13 for forming the protective film is energy ray curable, and has a tensile elastic modulus of at least 30 MPa. |
---|