Protective film-forming film and complex sheet for forming protective film

The present invention provides an energy ray-curable film for forming a protective film. The film for forming the protective film is capable of forming the protective film on the rear surface of a semiconductor wafer or a semiconductor chip, and is provided with a protective layer having a high elas...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: INAO, YOUICHI, KOBASHI, RIKIYA
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The present invention provides an energy ray-curable film for forming a protective film. The film for forming the protective film is capable of forming the protective film on the rear surface of a semiconductor wafer or a semiconductor chip, and is provided with a protective layer having a high elastic modulus. This film 13 for forming the protective film is energy ray curable, and has a tensile elastic modulus of at least 30 MPa.