Sprayed member, and method for producing yttrium oxyfluoride-containing sprayed coating

An yttrium oxyfluoride sprayed coating contains Y5O4F7 as a main component. In the yttrium oxyfluoride sprayed coating, when the total intensity of all peaks attributable to yttrium oxyfluoride in a diffraction spectrum obtained by X-ray diffractometry is assumed to be 100, the total intensity of al...

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Bibliographische Detailangaben
Hauptverfasser:	IGUCHI, MABITO, NORITAKE, YASUNOBU, HAYASAKA, YUUKI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	An yttrium oxyfluoride sprayed coating contains Y5O4F7 as a main component. In the yttrium oxyfluoride sprayed coating, when the total intensity of all peaks attributable to yttrium oxyfluoride in a diffraction spectrum obtained by X-ray diffractometry is assumed to be 100, the total intensity of all peaks attributable to yttrium fluoride and yttrium oxide is less than 10. Furthermore, in an yttrium oxyfluoride-containing sprayed coating, when the total intensity of all peaks attributable to yttrium oxyfluoride and yttrium fluoride in a diffraction spectrum obtained by X-ray diffractometry is assumed to be 100, the total intensity of all peaks attributable to yttrium oxide is less than 1.