WAFER BOAT CASSETTE WITH TWISTING KNOBS

A wafer boat cassette with twisting knobs is provided in the present invention, including two walls opposite to each other in a first direction, two bottom connecting bars extending in the first direction and connecting bottoms of the two walls, the two bottom connecting bars are provide with multip...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	TSAI, MINGIA, HSIEH, TSUNG-HSIEN, LEE, KUOIH, SHEN, YANG-YU, MAI, ZHENG-GUO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR BASIC ELECTRIC ELEMENTS CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS SEMICONDUCTOR DEVICES STORING TRANSPORTING
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Beschreibung
Zusammenfassung:	A wafer boat cassette with twisting knobs is provided in the present invention, including two walls opposite to each other in a first direction, two bottom connecting bars extending in the first direction and connecting bottoms of the two walls, the two bottom connecting bars are provide with multiple first slots for wafers to be placed thereon, and two fixing bars extending in the first direction and connecting edges of the two walls, the two fixing bars are provided with multiple second slots for fixing wafers, wherein the two fixing bars are rotatably set on the two walls through twisting knobs, and the positions where the two fixing bars set are higher than the center point of placed wafers.