Precise linear motor stage
The present invention relates to a precise linear motor stage and, more specifically, to an apparatus for precisely driving a linear motion using a linear motor. The precise linear motor stage provided by this invention has an effect of implementing an accurate and precise operation at a relatively...
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| Hauptverfasser: | , , |
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The present invention relates to a precise linear motor stage and, more specifically, to an apparatus for precisely driving a linear motion using a linear motor. The precise linear motor stage provided by this invention has an effect of implementing an accurate and precise operation at a relatively low price. In addition, the precise linear motor stage provided by this invention has advantages of having a relatively simple structure and enabling the precise operation without significantly increasing volume and weight. |
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