Foup cleaning device

Foup cleaning device

An object of the present invention is to provide a front opening unified pod (FOUP) cleaning device capable of improving the cleaning and drying efficiency of a FOUP body and a FOUP cover and improving the drying efficiency of a snorkel nozzle. The present invention for implementing the object provi...

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Hauptverfasser: SON, HYUK JOO, CHOI, WOO JIN, HEO, SUNG IL, LEE, MIN YOUNG, PARK, YOUNG SOO, KIM, YOUNG HO, HUR, DONG GEUN
Format: Patent
Sprache:chi ; eng
Schlagworte:
CLEANING
CLEANING IN GENERAL
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
TRANSPORTING
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creator SON, HYUK JOO
CHOI, WOO JIN
HEO, SUNG IL
LEE, MIN YOUNG
PARK, YOUNG SOO
KIM, YOUNG HO
HUR, DONG GEUN
description An object of the present invention is to provide a front opening unified pod (FOUP) cleaning device capable of improving the cleaning and drying efficiency of a FOUP body and a FOUP cover and improving the drying efficiency of a snorkel nozzle. The present invention for implementing the object provides a FOUP cleaning device for cleaning a FOUP, comprising a FOUP body and a FOUP cover. The FOUP body is provided with a foamed porous snorkel nozzle for purging the inside of the FOUP body. The FOUP cleaning device includes a cleaning chamber for cleaning the FOUP body and the FOUP cover using a cleaning fluid, wherein the cleaning chamber is provided with a compressed dry air supply unit for injecting compressed dry air into the snorkel nozzle after the cleaning of the FOUP body is completed. The cleaning chamber includes a stopper provided to rotate and drive a shaft for supporting one side of the FOUP body so that the FOUP body is not pushed to one side by the compressed dry air sprayed from the compressed dry
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subjects CLEANING
CLEANING IN GENERAL
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
TRANSPORTING
title Foup cleaning device
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