Foup cleaning device

An object of the present invention is to provide a front opening unified pod (FOUP) cleaning device capable of improving the cleaning and drying efficiency of a FOUP body and a FOUP cover and improving the drying efficiency of a snorkel nozzle. The present invention for implementing the object provides a FOUP cleaning device for cleaning a FOUP, comprising a FOUP body and a FOUP cover. The FOUP body is provided with a foamed porous snorkel nozzle for purging the inside of the FOUP body. The FOUP cleaning device includes a cleaning chamber for cleaning the FOUP body and the FOUP cover using a cleaning fluid, wherein the cleaning chamber is provided with a compressed dry air supply unit for injecting compressed dry air into the snorkel nozzle after the cleaning of the FOUP body is completed. The cleaning chamber includes a stopper provided to rotate and drive a shaft for supporting one side of the FOUP body so that the FOUP body is not pushed to one side by the compressed dry air sprayed from the compressed dry