Ion implantation system and lens

Provided herein are approaches for increasing operational range of an electrostatic lens. An electrostatic lens of an ion implantation system may receive an ion beam from an ion source, the electrostatic lens including a first plurality of conductive beam optics disposed along one side of an ion bea...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LIKHANSKII, ALEXANDRE, CUCCHETTI, ANTONELLA, SINCLAIR, FRANK, HERMANSON, ERIC D, CHANG, SHENGWU, CAMPBELL, CHRISTOPHER
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!