Method, apparatus, and system for provisioning an integrated circuit device

The present disclosure describes various aspects of secure provisioning with hardware verification. In some aspects, sensitive data are provisioned to an integrated circuit (IC) device through a provisioning process. Provisioning data for the IC device are divided into a plurality of fragments, and each fragment is encrypted in one of a plurality of cryptographic keys. Corresponding cryptographic keys are generated at the IC device. The encrypted fragments are transferred to the IC device in respective secure transfer operations, each including sending a seed value to the IC device, validating integrity data configured to characterize integrated circuitry within a portion of the IC device specified by the seed value, and transferring the encrypted fragment to the IC device in response to validating the integrity data. In response to completing the secure transfer operation, the IC device may reconstruct the provisioning data from the encrypted fragments and corresponding cryptographic keys.