TWI761563B

Provided is a valve with built-in heater, which is capable of reducing the liquefaction and vapor deposition of the gas passing through the valve in comparison with a conventional valve with built-in heater. The valve 1 with built-in heater is provided with: a valve main body 10 with a gas inlet flow path 11, a gas outlet flow path 12 and a valve seat 13 formed between said flow paths; a valve shaft 20 with a lower end portion formed thereon a valve body 21 abutted against or detached from the valve seat 13; a cover member 31 hermetically fixed on the upper portion of the valve main body 10 and penetrated by the valve shaft 20; and a bellows 39 welded and fixed to the valve shaft 20 and the cover member 31, wherein the cover member 31 has at least one heater inserting hole 34 and at least one stick heater 36 inserted and disposed in the heater inserting hole 34.