CONDUCTIVE MEMBER FOR DISCHARGE LASER

Excimer laser comprising a discharge chamber (12) and a conductive member (22) for conducting a current associated with an electric discharge in a discharge chamber of a laser, the conductive member comprising at least one channel (26a-26d) configured for increasing a current flow path in an end par...

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Hauptverfasser: NIEMANN, ULRICH, EFFENBERGER, ANDREW JAY JR
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Sprache:chi ; eng
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creator NIEMANN, ULRICH
EFFENBERGER, ANDREW JAY JR
description Excimer laser comprising a discharge chamber (12) and a conductive member (22) for conducting a current associated with an electric discharge in a discharge chamber of a laser, the conductive member comprising at least one channel (26a-26d) configured for increasing a current flow path in an end part (32, 34) of the conductive member relative to a current flow path in central part (34) of the conductive member, the conductive member configured for connecting the laser to a voltage source (24) and to provide an interface between the voltage source and the discharge chamber of the laser.
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EFFENBERGER, ANDREW JAY JR</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_TWI759894BB3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2022</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CURRENT COLLECTORS</topic><topic>DEVICES USING STIMULATED EMISSION</topic><topic>ELECTRICITY</topic><topic>LINE CONNECTORS</topic><toplevel>online_resources</toplevel><creatorcontrib>NIEMANN, ULRICH</creatorcontrib><creatorcontrib>EFFENBERGER, ANDREW JAY JR</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>NIEMANN, ULRICH</au><au>EFFENBERGER, ANDREW JAY JR</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>CONDUCTIVE MEMBER FOR DISCHARGE LASER</title><date>2022-04-01</date><risdate>2022</risdate><abstract>Excimer laser comprising a discharge chamber (12) and a conductive member (22) for conducting a current associated with an electric discharge in a discharge chamber of a laser, the conductive member comprising at least one channel (26a-26d) configured for increasing a current flow path in an end part (32, 34) of the conductive member relative to a current flow path in central part (34) of the conductive member, the conductive member configured for connecting the laser to a voltage source (24) and to provide an interface between the voltage source and the discharge chamber of the laser.</abstract><oa>free_for_read</oa></addata></record>
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language chi ; eng
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subjects BASIC ELECTRIC ELEMENTS
CURRENT COLLECTORS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
LINE CONNECTORS
title CONDUCTIVE MEMBER FOR DISCHARGE LASER
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