CONDUCTIVE MEMBER FOR DISCHARGE LASER

CONDUCTIVE MEMBER FOR DISCHARGE LASER

Excimer laser comprising a discharge chamber (12) and a conductive member (22) for conducting a current associated with an electric discharge in a discharge chamber of a laser, the conductive member comprising at least one channel (26a-26d) configured for increasing a current flow path in an end par...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: NIEMANN, ULRICH, EFFENBERGER, ANDREW JAY JR
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CURRENT COLLECTORS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
LINE CONNECTORS
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Excimer laser comprising a discharge chamber (12) and a conductive member (22) for conducting a current associated with an electric discharge in a discharge chamber of a laser, the conductive member comprising at least one channel (26a-26d) configured for increasing a current flow path in an end part (32, 34) of the conductive member relative to a current flow path in central part (34) of the conductive member, the conductive member configured for connecting the laser to a voltage source (24) and to provide an interface between the voltage source and the discharge chamber of the laser.