TWI759381B

A device 10 for manufacturing a diluted liquid has: first piping 11 for supplying a first liquid; a first tank 12a for storing a second liquid; second piping 13 that connects the first tank 12 and the first piping 11; a pressure adjustment unit 18 for adjusting the pressure in the first tank 12a, th...

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Hauptverfasser:	YAMANAKA, KOJI, MORINO, SHOTA, YAMASHITA, YUKINARI
Format:	Patent
Sprache:	chi
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES THEIR RELEVANT APPARATUS TRANSPORTING
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