TWI759381B

A device 10 for manufacturing a diluted liquid has: first piping 11 for supplying a first liquid; a first tank 12a for storing a second liquid; second piping 13 that connects the first tank 12 and the first piping 11; a pressure adjustment unit 18 for adjusting the pressure in the first tank 12a, th...

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Bibliographische Detailangaben
Hauptverfasser:	YAMANAKA, KOJI, MORINO, SHOTA, YAMASHITA, YUKINARI
Format:	Patent
Sprache:	chi
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	A device 10 for manufacturing a diluted liquid has: first piping 11 for supplying a first liquid; a first tank 12a for storing a second liquid; second piping 13 that connects the first tank 12 and the first piping 11; a pressure adjustment unit 18 for adjusting the pressure in the first tank 12a, the pressure adjustment unit 18 sending the second liquid inside the first tank 12a via the second piping 13 and supplying the second liquid to the first piping 11; a control unit 20 that adjusts the addition amount of the second liquid to the first liquid by the pressure adjustment unit 18 so that the concentration of the diluted liquid reaches a prescribed concentration on the basis of the flow rate of the first liquid or the diluted liquid flowing in the first piping 11, and the concentration of the diluted liquid; and a second tank 12b connected in series to the first tank 12a, the second tank 12b temporarily storing the second liquid for replenishing the first tank 12a.