Method of controlling apparatus for manufacturing organic electronic device

The present invention provides a method for managing a manufacturing apparatus that manufactures a high-performance organic electronic device, irrespective of the configuration of the organic electronic device or the manufacturing apparatus. The management method according to one embodiment of the p...

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Bibliographische Detailangaben
Hauptverfasser:	SUEKANE, TAKASHI, YOSHIZAKI, MAKOTO, IMANISHI, KATSUYA, YUKIWAKI, SATOSHI, FUJIMOTO, HIROSHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The present invention provides a method for managing a manufacturing apparatus that manufactures a high-performance organic electronic device, irrespective of the configuration of the organic electronic device or the manufacturing apparatus. The management method according to one embodiment of the present invention comprises a positioning step for positioning a substrate (2) inside the manufacturing apparatus (1), and a detection step for detecting impurities attached to the substrate (2), the impurities deriving from the materials of the organic electronic device and/or the manufacturing apparatus.