TWI754264B

According to the present invention, a hydraulic drive system stretches a target to be pressed in a chamber becoming a vacuum atmosphere. The hydraulic drive system has a vacuum actuator and a hydraulic drive unit. The hydraulic drive unit includes a hydraulic pressure generation unit, a drive unit t...

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Bibliographische Detailangaben
Hauptverfasser: SHIBAYAMA, KOUJI, SAKODA, SEIYA, SUZUKI, MIKIYA, WADA, SHINICHI, ISHIDA, TOMOYA, TOKUHIRA, SHINNOSUKE, TERUI, TAKAAKI, FURUSE, HARUKUNI, ENDO, JIROU, INOUE, HIDEAKI, WADE, TAKUYA
Format: Patent
Sprache:chi
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Beschreibung
Zusammenfassung:According to the present invention, a hydraulic drive system stretches a target to be pressed in a chamber becoming a vacuum atmosphere. The hydraulic drive system has a vacuum actuator and a hydraulic drive unit. The hydraulic drive unit includes a hydraulic pressure generation unit, a drive unit to drive the hydraulic pressure generation unit, and a power supply to supply power to the drive unit. A stretching rod can be driven by a working hydraulic pressure supplied to a fixing unit from the hydraulic drive unit. When the stretching rod moves in a separating direction from the target by the bias force of a hydraulic bias member, an inversion response unit corresponding to an inversion state of a motor is installed on the drive unit.