Semiconductor structure and method of formation
The present disclosure provides a semiconductor structure and a method of forming the same. The semiconductor structure includes a substrate, a first device, a second device, a fin, a first gate dielectric layer, a second gate dielectric layer, and a cut region of the fin. The second device is adjac...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The present disclosure provides a semiconductor structure and a method of forming the same. The semiconductor structure includes a substrate, a first device, a second device, a fin, a first gate dielectric layer, a second gate dielectric layer, and a cut region of the fin. The second device is adjacent to the first device. The fin is disposed on the substrate between the first device and the second device. The first gate dielectric layer is disposed on a first portion of the fin, and the second gate dielectric layer is disposed on a second portion of the fin. The cut region of the fin is formed within a trench between the first device and the second device. |
---|