Substrate processing apparatus

A purpose of the present invention is to provide a substrate processing device capable of stably transferring a substrate between a plurality of chambers. The substrate processing device of the present invention for implementing the purpose comprises: a plurality of chambers arranged at regular intervals along a circumferential direction to process a substrate; and a turntable provided to rotate to transfer the substrate between a plurality of chambers. A stage mounted on the substrate and a stage driving unit configured to provide driving power to vertically elevate the stage are installed in at least one chamber among the plurality of chambers. The turntable comprises: a turntable body elevated and rotated by a turntable driving unit; and a ring-shaped turntable ring provided to be detachable from the turntable body while being placed on the turntable body.