Assembly device and assembly method for semiconductor manufacturing device

Provided is an assembling apparatus for a semiconductor manufacturing apparatus. The assembling apparatus includes: a body; lift attached to the body and configured to move a reaction tube having an opening at a lower end portion thereof vertically, thereby allowing a gas supply pipe to be installed...

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Bibliographische Detailangaben
Hauptverfasser: KUMAGAI, YOSHIHISA, HATAKEYAMA, TAMOTSU, KIKUCHI, HIROSHI, HASEGAWA, HARUNARI, KOBAYASHI, MASAHIRO, TAKAHASHI, MICHIHIRO, INOUE, HISASHI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:Provided is an assembling apparatus for a semiconductor manufacturing apparatus. The assembling apparatus includes: a body; lift attached to the body and configured to move a reaction tube having an opening at a lower end portion thereof vertically, thereby allowing a gas supply pipe to be installed inside the reaction tube through the opening while the reaction tube is held by the lift; gas supply source configured to supply a gas into the reaction tube through the gas supply pipe while the reaction tube is held by the lift; and an exhaust mechanism including a pump configured to exhaust an inside of the reaction tube through the opening, thereby performing a leakage test of the reaction tube while the reaction tube is held by the lift.