FERROELECTRIC MEMORIES AND METHOD FOR FABRICATING THE SAME

A ferroelectric memory is provided. The ferroelectric memory includes a substrate, a first conductive layer disposed on the substrate, a patterned oxide layer disposed on the first conductive layer and the substrate, exposing a part of the first conductive layer, a second conductive layer disposed o...

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Bibliographische Detailangaben
Hauptverfasser: YANG, HSIN-YUN, YEH, POUN, LIN, YU-DE, LEE, HENG-YUAN, WANG, CHIH-YAO
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A ferroelectric memory is provided. The ferroelectric memory includes a substrate, a first conductive layer disposed on the substrate, a patterned oxide layer disposed on the first conductive layer and the substrate, exposing a part of the first conductive layer, a second conductive layer disposed on the exposed first conductive layer and the patterned oxide layer, an antiferroelectric layer disposed on the exposed first conductive layer and the second conductive layer, a ferroelectric layer disposed on the second conductive layer and located on the antiferroelectric layer, a conductive oxide layer disposed between the antiferroelectric layer, and a third conductive layer disposed on the conductive oxide layer and between the ferroelectric layer.