Processing device

Debris remaining on an upper plane of a plurality of cover elements constituting a protective cover is reduced. To this end, the present invention comprises: a processing table maintaining an object to be processed; a moving device linearly moving the processing table; a protective cover which has a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ISHIBASHI, KANJI, SHIRAI, KATSUMASA, HARADA, AKIYUKI
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:Debris remaining on an upper plane of a plurality of cover elements constituting a protective cover is reduced. To this end, the present invention comprises: a processing table maintaining an object to be processed; a moving device linearly moving the processing table; a protective cover which has a plurality of cover elements covering the moving device while being overlapped with each other, and is stretched corresponding to movement of the processing table; and a slide member moving relative to a plurality of protective covers accompanied with the processing table, and sliding on the upper plane of the plurality of cover elements.