Processing device
Debris remaining on an upper plane of a plurality of cover elements constituting a protective cover is reduced. To this end, the present invention comprises: a processing table maintaining an object to be processed; a moving device linearly moving the processing table; a protective cover which has a...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | Debris remaining on an upper plane of a plurality of cover elements constituting a protective cover is reduced. To this end, the present invention comprises: a processing table maintaining an object to be processed; a moving device linearly moving the processing table; a protective cover which has a plurality of cover elements covering the moving device while being overlapped with each other, and is stretched corresponding to movement of the processing table; and a slide member moving relative to a plurality of protective covers accompanied with the processing table, and sliding on the upper plane of the plurality of cover elements. |
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