Silicon-containing underlayers

Methods of manufacturing electronic devices employing wet-strippable underlayer compositions comprising one or more condensed polymers having an organic polymer chain having pendently-bound moieties having an acidic proton and a pKa in water from −5 to 13 and having pendently-bound siloxane moieties...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YAMADA, SHINTARO, KE, IOU-SHENG, CAMERON, JAMES F, LABEAUME, PAUL J, CUI, LI, CUTLER, CHARLOTTE A, COLEY, SUZANNE M
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:Methods of manufacturing electronic devices employing wet-strippable underlayer compositions comprising one or more condensed polymers having an organic polymer chain having pendently-bound moieties having an acidic proton and a pKa in water from −5 to 13 and having pendently-bound siloxane moieties are provided.