TWI732428B

A sputtering target that is 10-20 at% B, the remainder including Fe. As observed by SEM image, the average area of Fe-B phases of the sputtering target is no more than 20 μm2.

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Bibliographische Detailangaben
Hauptverfasser: SOGAWA, SHINJI, ARAKAWA, ATSUTOSHI
Format: Patent
Sprache:chi
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Zusammenfassung:A sputtering target that is 10-20 at% B, the remainder including Fe. As observed by SEM image, the average area of Fe-B phases of the sputtering target is no more than 20 μm2.