TWI732428B
A sputtering target that is 10-20 at% B, the remainder including Fe. As observed by SEM image, the average area of Fe-B phases of the sputtering target is no more than 20 μm2.
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Zusammenfassung: | A sputtering target that is 10-20 at% B, the remainder including Fe. As observed by SEM image, the average area of Fe-B phases of the sputtering target is no more than 20 μm2. |
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