TWI726114B

TWI726114B

A substrate inspection apparatus capable of suppressing deterioration of user convenience when inspecting a semiconductor device without separating the semiconductor device from a substrate is provided. A WLSLT apparatus 10, which is connected to a user controller 29 configured to control a PKGSLT a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SUGIYAMA, KATSUAKI, KOSUGA, YUTAKA, NARIKAWA, KENICHI, MITSUI, ATSUO
Format: Patent
Sprache:chi
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A substrate inspection apparatus capable of suppressing deterioration of user convenience when inspecting a semiconductor device without separating the semiconductor device from a substrate is provided. A WLSLT apparatus 10, which is connected to a user controller 29 configured to control a PKGSLT apparatus 28 and configured to inspect a semiconductor device formed on a wafer W without separating the semiconductor device from the wafer W, includes a test program engine 27 configured to convert a command complying with a command protocol specific to the PKGSLT apparatus 28 into a command complying with a command protocol specific to the WLSLT apparatus 10.