Memory element and method for manufacturing the same

A memory device includes a stacked structure. The stacked structure includes a plurality of interlayer dielectric layers and a gate structure between adjacent interlayer dielectric layers. A charge trapping layer and a blocking layer are between the adjacent interlayer dielectric layers. The blockin...

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Bibliographische Detailangaben
Hauptverfasser: FU, JIE FEI, WANG, QI GUANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A memory device includes a stacked structure. The stacked structure includes a plurality of interlayer dielectric layers and a gate structure between adjacent interlayer dielectric layers. A charge trapping layer and a blocking layer are between the adjacent interlayer dielectric layers. The blocking layer envelops the charge trapping layer and separates the charge trapping layer from the gate structure. A tunneling layer is disposed along a sidewall of the stacked structure and in contact with each of the gate structure and the charge trapping layer. A channel layer is disposed on a sidewall of the tunneling layer.