A full-field dynamic monitor method for pellicle membrane and a full-field dynamic monitor system

A global dynamic detection method for a pellicle membrane (122) of a photomask includes: causing the pellicle membrane (122) to undergo broadband oscillation; applying a broadband signal to the pellicle membrane (122) undergoing multi-frequency oscillation; transforming an optical time-domain signal...

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Bibliographische Detailangaben

1. Verfasser:	LEE, YUING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TESTING
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