A full-field dynamic monitor method for pellicle membrane and a full-field dynamic monitor system

A global dynamic detection method for a pellicle membrane (122) of a photomask includes: causing the pellicle membrane (122) to undergo broadband oscillation; applying a broadband signal to the pellicle membrane (122) undergoing multi-frequency oscillation; transforming an optical time-domain signal...

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Bibliographische Detailangaben
1. Verfasser:	LEE, YUING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A global dynamic detection method for a pellicle membrane (122) of a photomask includes: causing the pellicle membrane (122) to undergo broadband oscillation; applying a broadband signal to the pellicle membrane (122) undergoing multi-frequency oscillation; transforming an optical time-domain signal reflecting off the pellicle membrane (122) to obtain a frequency spectrum with multiple resonance frequencies; and detecting the pellicle membrane (122) with the frequency spectrum comprehensively to ensure the quality of the pellicle membrane. A global dynamic detection system for use with the global dynamic detection method is further provided.