System, non-transitory computer readable medium and method for lot-tool assignment

A system includes a dispatching system and at least one processor. The dispatching system is configured to provide dispatching preferences indicating that tools feedback preferences thereof for at least one lot. The processor is coupled to the dispatching system and at least one memory. Computer pro...

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Bibliographische Detailangaben
Hauptverfasser:	YEH, JUN SHENG, YOU, REN CHYI, PENG, AN WEI, LIU, CHANG ZONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A system includes a dispatching system and at least one processor. The dispatching system is configured to provide dispatching preferences indicating that tools feedback preferences thereof for at least one lot. The processor is coupled to the dispatching system and at least one memory. Computer program code encoded in the memory is executed by the processor to cause the system to process the lot using at least one of the tools with utilization of a tool-lot relationship that is generated based on the dispatching preferences. A non-transitory computer readable medium and a method are also disclosed herein.