Method for detecting a leak in a specimen

Method for detecting a leak in a specimen contained in a test chamber, the method comprising the following steps: positioning the specimen in the test chamber, evacuating the test chamber, measuring the partial pressure in the test chamber as a measuring signal M during the evacuation of the test ch...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	PUCHALLA- KOENIG, JOCHEN, GERDAU, LUDOLF
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING PHYSICS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	Method for detecting a leak in a specimen contained in a test chamber, the method comprising the following steps: positioning the specimen in the test chamber, evacuating the test chamber, measuring the partial pressure in the test chamber as a measuring signal M during the evacuation of the test chamber, forming a difference D from the progress of the signal M(t) over time t and a fitting function F(t) including the term t−n, where n is a positive rational number, and judging the presence of a leak in the specimen based on the differential signal D.