TOOL FOR MODIFYING A SUPPORT SURFACE

A tool (1) for modifying substrate support elements (21) of a substrate holder (20), the substrate support elements having support surfaces (22) for supporting a substrate, said tool comprising a main body (2) having a main body surface (3), wherein the tool comprises multiple protrusions (4) from t...

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Bibliographische Detailangaben
Hauptverfasser:	MEHAGNOUL, HAROLD ANTON, SCHOLTEN, BERT DIRK, BILLEKENS, PETER ANDREAS MARIA, VAN NUENEN, CAS JOHANNES PETRUS MARIA, VERMEULEN, MARCUS MARTINUS PETRUS ADRIANUS, GUAN, TIANNAN, VAN DE WINKEL, JIMMY MATHEUS WILHELMUS, VAN VERSEVELD, HENDRIKUS THEODORUS JACOBUS FRANCISCUS, LINDEIJER, TJARCO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A tool (1) for modifying substrate support elements (21) of a substrate holder (20), the substrate support elements having support surfaces (22) for supporting a substrate, said tool comprising a main body (2) having a main body surface (3), wherein the tool comprises multiple protrusions (4) from the main body surface, the multiple protrusions having distal ends (5) configured to contact the support surfaces and to modify the substrate support elements. Furthermore, a lithographic apparatus and a method comprising such a tool are disclosed.