TWI702644B

Provided is a semiconductor processing sheet provided with a base film and a pressure-sensitive adhesive layer laminated on at least one side of the base film, the semiconductor processing sheet being characterized in that the base film contains a vinyl chloride-based resin and an adipate ester-base...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: NAKAMURA, MASATOMO, ADACHI, ISSEI
Format: Patent
Sprache:chi
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Provided is a semiconductor processing sheet provided with a base film and a pressure-sensitive adhesive layer laminated on at least one side of the base film, the semiconductor processing sheet being characterized in that the base film contains a vinyl chloride-based resin and an adipate ester-based plasticizer and a terephthalate ester-based plasticizer as plasticizers and the mass ratio of the content of the adipate ester-based plasticizer with reference to the total content of the adipate ester-based plasticizer and the terephthalate ester-based plasticizer in the base film is 50-80 mass%. Even while using a replacement for alkyl phthalate esters as plasticizer, this semiconductor processing sheet exhibits a satisfactory flexibility and can suppress the occurrence of residues when peeled from an adherend.