TWI702644B
Provided is a semiconductor processing sheet provided with a base film and a pressure-sensitive adhesive layer laminated on at least one side of the base film, the semiconductor processing sheet being characterized in that the base film contains a vinyl chloride-based resin and an adipate ester-base...
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Format: | Patent |
Sprache: | chi |
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Zusammenfassung: | Provided is a semiconductor processing sheet provided with a base film and a pressure-sensitive adhesive layer laminated on at least one side of the base film, the semiconductor processing sheet being characterized in that the base film contains a vinyl chloride-based resin and an adipate ester-based plasticizer and a terephthalate ester-based plasticizer as plasticizers and the mass ratio of the content of the adipate ester-based plasticizer with reference to the total content of the adipate ester-based plasticizer and the terephthalate ester-based plasticizer in the base film is 50-80 mass%. Even while using a replacement for alkyl phthalate esters as plasticizer, this semiconductor processing sheet exhibits a satisfactory flexibility and can suppress the occurrence of residues when peeled from an adherend. |
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