Method and apparatus for correcting substrate deformity

Embodiments of methods and apparatus for correcting substrate deformity are provided herein. In some embodiments, a substrate support includes a base having an interior volume formed by walls extending upward from the base; a plurality of infrared lamps disposed within the interior volume; a support...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ELUMALAI, KARTHIK, PEH, ENG SHENG, RAJAPAKSA, DIMANTHA, SU, JUN-LIANG, VAYYAPRON, SHOJU, THIRUNAVUKARASU, SRISKANTHARAJAH, TATTI, ARUNKUMAR M
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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