Ion implanter, component of the ion implanter and process for producing the component

Ion implanter, component of the ion implanter and process for producing the component

The invention relates to an ion implanter which comprises at least one component of a refractory metal of the group W, W alloy, Mo and Mo alloy. The surface of said component comprises, at least in sections, a layer that is formed, at least in sections, by at least one compound formed by at least on...

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Bibliographische Detailangaben
Hauptverfasser: MAYR-SCHMOELZER, BERNHARD, WERNINGHAUS, THOMAS, KATHREIN, MARTIN
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:The invention relates to an ion implanter which comprises at least one component of a refractory metal of the group W, W alloy, Mo and Mo alloy. The surface of said component comprises, at least in sections, a layer that is formed, at least in sections, by at least one compound formed by at least one element selected from the group consisting of C, B and N combined with at least one element selected from the group consisting of W and Mo.