TWI684574B

PROBLEM TO BE SOLVED: To provide an apparatus or the like for treating water to be treated which can treat both first water to be treated containing ammonia and second water to be treated containing TMAH, and whose installation area can be made smaller, and whose operation management can be facilitated.SOLUTION: The apparatus 1 for treating water to be treated is provided for treating cleaning waste water W1 containing ammonia and development waste water W2 containing tetramethylammonium hydroxide (TMAH). The apparatus 1 comprises: a nitrifying unit 200 which oxidizes ammonia contained in the cleaning waste water W1 into nitrite nitrogen and nitrate nitrogen using nitrifying bacteria containing ammonia oxidation bacteria; and a denitrifying unit 500 which denitrifies nitrite nitrogen and nitrate nitrogen contained in cleaning waste water W1' which is treated by the nitrifying unit 200, using TMAH contained in the development waste water W2 as a hydrogen donor.SELECTED DRAWING: Figure 1